Optical 3D profilometry
Our instruments:
1. Proprietary optical chromatic confocal scanning microscope
Capabilities:
• 5-axis scanning, measurement of curved surfaces
• Lateral resolution: 1μm
• Perpendicular accuracy: 0.1μm
• Measurement speed: max 20kHz
2. Filmetrics Profilm 3D white light microscope
Capabilities:
• 2 axis scanning, measurement of flat surfaces
• Lateral pontosság: 0.5μm
• Perpendicular accuracy: 0.01μm